TU Ilmenau Launches €4 Million Project for High-Precision Nanostructures
On May 6, TU Ilmenau initiated a €4 million project to develop a high-precision machine for nanostructures up to one square meter. This project, funded by the Deutsche Forschungsgemeinschaft, aims for precision below an atom's size, with applications in electronics, photonics, and energy research.
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The Technische Universität Ilmenau, in collaboration with the Friedrich-Schiller-Universität Jena and the Fraunhofer Institute for Applied Optics and Fine Mechanics (IOF), has launched a research project focused on a new machine capable of creating nanostructures up to one square meter with positioning accuracy below an atom's diameter. The project is structured in three phases and lasts until 2032, with the first phase receiving €4 million funding.
Current methods limit nanostructures to 30 centimeters, while the new 3D-Nanolithography and Nanomeasurement Machine (3D-NLM) will allow for three times larger dimensions. This advancement is crucial for diverse applications including advanced optical components for Earth observation and quantum computing technologies. The anticipated precision is aimed at 20 picometers across the entire square meter area, significantly enhancing current capabilities.
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