Bruker Enhances Photothermal AFM-IR for Semiconductor Research
Bruker Corporation is advancing its photothermal AFM-IR spectroscopy capabilities through a Joint Development Project with imec to meet evolving requirements in semiconductor materials characterization. This initiative aims to enhance understanding of nanoscale materials crucial for next-generation semiconductor devices.
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Bruker Corporation is accelerating its development of photothermal AFM-IR spectroscopy in collaboration with imec to tackle critical challenges in semiconductor research. The Dimension IconIR system has been installed to evaluate its effectiveness in addressing nanoscale chemical characterization, which is essential for semiconductor process development.
This project will focus on areas like EUV photoresist development and advanced materials for transistor scaling. The collaboration aims to enhance insights into material behavior at the nanoscale, providing data that conventional methods cannot achieve, thereby supporting next-generation device concepts.
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