Rigaku and Onto Innovation Forge Alliance with 27% Equity Investment
Rigaku Holdings has entered a strategic alliance with Onto Innovation, involving a 27% equity investment valued at approximately $710 million. This partnership aims to enhance semiconductor process control through combined X-ray and optical metrology technologies, targeting a market opportunity exceeding $300 million by 2030.

Rigaku Holdings Corporation will collaborate with Onto Innovation Inc. through a strategic capital investment, acquiring 27% of Rigaku's shares. This partnership is designed to enhance semiconductor process control, integrating Rigaku's X-ray technologies with Onto's optical metrology and advanced analytics software.
The investment will facilitate the development of hybrid metrology solutions, particularly for advanced logic and memory devices, and is projected to unlock a market exceeding $1 billion in the coming years. The deal is expected to close in the second half of 2026, pending regulatory approvals, allowing Rigaku to maintain management independence while leveraging Onto's global customer base.




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