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Chinese Researchers Develop Advanced ABF Crystal for Vacuum UV Laser Technology

SEMICONDUCTOR

A Chinese research team has developed ammonium fluorooxoborate (ABF), a high-performance crystal that enables lasers to achieve a record-breaking wavelength of 158.9 nanometers, marking a significant advancement in vacuum ultraviolet laser technology. Led by Pan Shilie at the Xinjiang Technical Institute of Physics and Chemistry, this development overcomes previous limitations in laser precision and stability crucial for industrial use.

The ABF crystal's applications include etching circuits in semiconductor manufacturing and ultrafine treatments in aerospace and medical devices. The Xinjiang institute aims to stabilize large-scale production and integrate these crystals into affordable laser systems for high-end factories globally.

Chinese Researchers Develop Advanced ABF Crystal for Vacuum UV Laser Technology
Feb 12, 2026, 6:07 PM

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