DAS Environmental Experts Launches SALIX Wet Scrubber Portfolio for Semiconductor Manufacturing in China

DAS Environmental Experts has introduced the SALIX wet scrubber product family, designed for efficient treatment of waste gases in semiconductor manufacturing. The systems provide high removal efficiency for substances like IPA, ammonia, and hydrofluoric acid. The portfolio includes SALIX, SALIX MINI, and SALIX MICRO, offering flexible integration options for various fab layouts. The products will be showcased at SEMICON China 2026 in Shanghai.

Published Mar 24, 2026

DAS Environmental Experts has launched the SALIX wet scrubber product family, targeting the semiconductor manufacturing sector in China. These high-efficiency systems are designed to treat waste gases from wet chemical processes, ensuring the removal of substances such as IPA, ammonia, and hydrofluoric acid.

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The portfolio includes the standard SALIX, the compact SALIX MINI, and the highly compact SALIX MICRO, allowing for flexible integration into semiconductor fabs. SALIX systems are compatible with common process tools and support high uptime and long maintenance intervals. The product line will be presented at SEMICON China 2026 in Shanghai from March 25-27.